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Excimer laser patterning of TiN film from metal sacrificial layers

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conference contribution
posted on 2024-07-26, 14:57 authored by Andrew J. Dowling, Muralidhar K. Ghantasala, Jason P. Hayes, Erol C. Harvey, Derry Doyle
Abstract not reproduced here by request of the publisher. The text is available from: http://doi.org/10.1117/12.449005.

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ISSN

0277-786X

Journal title

Proceedings of SPIE--the International Society for Optical Engineering

Conference name

Device and Process Technologies for MEMS and Microelectronics II, Symposium on Microelectronics and Micro-Electro-Mechanical Systems 2001, Adelaide, Australia, 17 December 2001

Volume

4592

Pagination

7 pp

Publisher

SPIE

Copyright statement

Copyright © 2001 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 4592), and is available from: http://doi.org/10.1117/12.449005. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content are prohibited.

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eng

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