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Fabrication, measurement and modeling of electroosmotic flow in micromachined polymer microchannels

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conference contribution
posted on 2024-07-13, 03:16 authored by Nihal U. Suriyage, Muralidhar K. Ghantasala, Pio Iovenitti, Erol C. Harvey
Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.521576.

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SPIE Device and Process Technologies for MEMS, Microelectronics, and Photonics III Conference, Perth, Western Australia, Australia, 10 December 2003 / J. C. Chiao, A. J. Hariz, D. N. Jamieson, G. Parish and V. K. Varadan (eds.)

Conference name

SPIE Device and Process Technologies for MEMS, Microelectronics, and Photonics III Conference, Perth, Western Australia, Australia, 10 December 2003 / J. C. Chiao, A. J. Hariz, D. N. Jamieson, G. Parish and V. K. Varadan eds.

Volume

5272

Pagination

11 pp

Publisher

SPIE

Copyright statement

Copyright © 2004 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (vol. 5272, pp. 149-160), and is available from: http://dx.doi.org/10.1117/12.521576. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content are prohibited.

Language

eng

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