Laser microfabrication of three-dimensional photonic crystal templates in polymers
conference contribution
posted on 2024-07-09, 23:12 authored by Vygantas Mizeikis, Kock Khuen Seet, Saulius JuodkazisSaulius Juodkazis, Hiroaki MisawaThree-dimensional woodpile photonic crystal structures were recorded in films of polymeric photoresists polymethylcrylate (PMMA) and SU-8 films by femtosecond laser microfabrication technique. The fabricated structures consist of periodic arrays of extended elliptical void-channels in PMMA, and of solid elliptical rods of cross-linked polymer in SU-8. Their lattice periods of several micrometers and typical sub-micrometric feature sizes allowed to confirm presence of pronounced photonic stop-bands at infrared wavelengths around 2.0-8.0 μm.
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0277-786XJournal title
Proceedings of SPIE - The International Society for Optical EngineeringConference name
SPIE - The International Society for Optical EngineeringVolume
5662Pagination
5 ppPublisher
SPIECopyright statement
Copyright © 2004 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 5662), and is available from: http://dx.doi.org/10.1117/12.595880. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.Language
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