Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses
conference contribution
posted on 2024-07-12, 17:23 authored by Daniel Day, Min GuAbstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.638336.
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Device and Process Technologies for Microelectronics, MEMS, and Photonics IV Conference, Brisbane, Australia, 12 December 2005 / Jung-Chih Chiao, Andrew S. Dzurak, Chennupati Jagadish, David V. Thiel (eds.)Conference name
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV Conference, Brisbane, Australia, 12 December 2005 / Jung-Chih Chiao, Andrew S. Dzurak, Chennupati Jagadish, David V. Thiel eds.Volume
6037Publisher
SPIE - International Society for Optical EngineeringCopyright statement
Copyright © 2006 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6037), and is available from: http://dx.doi.org/10.1117/12.638336. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of The content are prohibited.Language
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