Single-shot selective laser micromachining of filtered arc deposited TiN films from chromium underlayer
conference contribution
posted on 2024-07-26, 14:57 authored by Andrew J. Dowling, Muralidhar K. Ghantasala, Peter E. Evans, Jason P. Hayes, Erol C. Harvey, E. Derry DoyleAbstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.469051.
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0277-786XJournal title
SPIE: Smart Materials II, Melbourne, Vicroria, Australia, 16-17 December 2002 / A. R. Wilson and V. V. Varadan (eds.)Conference name
SPIE: Smart Materials II, Melbourne, Vicroria, Australia, 16-17 December 2002 / A. R. Wilson and V. V. Varadan eds.Volume
4934Issue
1Pagination
7 ppPublisher
International Society for Optical EngineeringCopyright statement
Copyright © 2002 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 4934), and is available from: http://dx.doi.org/10.1117/12.469051. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content are prohibited.Language
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