Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
conference contribution
posted on 2024-07-09, 23:07 authored by Saulius JuodkazisSaulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki MisawaAbstract not reproduced here by request of the publisher. The text is available from http://dx.doi.org/10.1117/12.751889
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819468908ISSN
0277-786XJournal title
Proceedings of SPIE - The International Society for Optical EngineeringConference name
SPIE - The International Society for Optical EngineeringVolume
6732Publisher
SPIECopyright statement
Copyright © 2007 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6732), and is available from: http://dx.doi.org/10.1117/12.751889. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content are prohibited.Language
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