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Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

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conference contribution
posted on 2024-07-09, 23:07 authored by Saulius JuodkazisSaulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa
Abstract not reproduced here by request of the publisher. The text is available from http://dx.doi.org/10.1117/12.751889

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ISBN

819468908

ISSN

0277-786X

Journal title

Proceedings of SPIE - The International Society for Optical Engineering

Conference name

SPIE - The International Society for Optical Engineering

Volume

6732

Publisher

SPIE

Copyright statement

Copyright © 2007 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6732), and is available from: http://dx.doi.org/10.1117/12.751889. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content are prohibited.

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eng

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