Experimental aspects of multiharmonic-order coherent diffractive imaging

We describe some experimental aspects required for the implementation of a few-order high-harmonic source for coherent diffractive imaging in the extreme-ultraviolet region. Polychromatic high-angle diffractive images have been successfully processed for both periodic and aperiodic inorganic samples using a modified Gerchberg-Saxton algorithm and maximum-entropy-method refinement and reconstructions yielding a resolution of 100 nm can now be achieved at harmonic wavelengths around 32 nm.