Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses

We report on a feature, that of hillock-shaped damage, formed on a glass surface by femtosecond pulses of tp = 180 fs [full width at half maximum (FWHM) value] duration produced by a recording beam focus with energy of 5 nJ/pulse at 800 nm wavelength (the corresponding irradiance of about 7.6 TW/cm2 was evaluated for a 0.68 μm FWHM spot size). Single hillocks of 40–50 nm height were recorded reproducibly in single-pulse irradiation. Surface nanopatterning over a large, curved area (over 200 μm2) can be achieved by implementing a confocal surface curvature tracking method that utilizes the reflection of a supplementary cw-laser beam. The ablation pattern achieved by this method is consistent with that of a Coulomb explosion.