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Templating and replication of spiral photonic crystals for silicon photonics

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posted on 2024-07-09, 19:33 authored by Kock Khuen Seet, V. Mizeikis, Kenta Kannari, Saulius JuodkazisSaulius Juodkazis, Hiroaki Misawa, Nicolas Tétreault, Sajeev John
This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5-µm wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.

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ISSN

1077-260X

Journal title

IEEE Journal on Selected Topics in Quantum Electronics

Volume

14

Issue

4

Pagination

9 pp

Publisher

IEEE

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Copyright © 2008 IEEE. The published version is reproduced in accordance with the copyright policy of the publisher. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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eng

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