Advanced Robust Control Design for Micro/Nano- Positioning Systems

The piezoelectric (PZT) micro-actuator can produce extremely small displacements in the range of subnanometer to a few hundreds micro-meters. This research is involved modeling and robust control design achieve fast and accurate positioning performance. Good application examples that using micro-actuator are the scanning probe microscopes (SPM) and the atomic force microscope (AFM). These nano-positioning tools are extensively used in micro/nano applications such as the nano-manufacturing and biological cell manipulation and so on. Thus, We believe that this research can contribute to the field of motion control that utilizes the micro/nano-actuators.