Three-dimensional optical beam lithography for functional photonic devices

Functional photonic devices which can be used to manipulate light including its emission, propagation and interaction with materials has the promising vision as the platform for a wide range of future technologies based on light such as photonic chip and optical computing. As the unique functions of the photonic devices are determined by the materials which made the devices and the geometric configurations of the materials, this thesis investigates the fabrication of these devices via three-dimensional optical beam lithography with showing the unique advantage, improving the fabrication resolution below 10 nanometers and extending the suitable material range for the full photonic function demonstration.